Feature-Scale Modeling of Isotropic SF6 Plasma Etching of Si
Correction request for all types of previously submitted publications
- URL to incorrect publication entry in repositum: https://repositum.tuwien.at/handle/20.500.12708/77492
Note: The abstract and the full paper have been somehow merged by the repositum team which is utterly wrong.
- Error descriptions and corrections
- Error 1: Wrong title
- Correction: "Feature-Scale Modeling of Isotropic SF6 Plasma Etching of Si"
- Error 2: Wrong publication type
- Correction: Konferenzbeitrag - Abstract Book Contribution
- Error 3: Wrong DOI
- Correction: this is an abstract and doesn't have a DOI
- Error 4: Wrong publisher
- Correction: remove publisher
- Error 1: Wrong title