Process Simulation in Micro- and Nano-Electronics

Talk (with paper)

• Category: Abstract book contribution
• Title: Process Simulation in Micro- and Nano-Electronics
• Authors:
  • Filipovic, Lado (m, E360)
  • Reiter, Tobias (m, E360)
  • Klemenschits, Xaver (m, E360)
  • Leroch, Sabine (f, E360)
  • Stella, Robert (m, E360)
  • Baumgartner, Oskar (m, external)
  • Hössinger, Andreas (m, external)
• Presenters:
  • Filipovic, Lado (m, E360)
• Conference: International Workshop on Computational Nanotechnology 2023
• Proceedings Title: Book of abstracts of the International Workshop on Computational Nanotechnology 2023
• Proceedings Link: https://iwcn2023.uab.es/IWCN2023_book_of_abstracts.pdf
• Conference City: Barcelona
• Conference Country: Spain
• Conference Dates: 12/06/2023 - 16/06/2023
• Conference Format: On-site
• Conference Website: https://iwcn2023.uab.es/
• Start Page: 38
• End Page: 39
• Number of pages: 2
• ISBN: n.a.
• DOI: n.a.
• Language: English
• Keywords: Nano-electronics, Process Simulation, TCAD
• Open access: no
• Research projects (Name of related research projects including + funding IDs):
  • Christian Doppler Laboratory for Multi-Scale Process Modeling of Semiconductor Devices and Sensors
  • FFG Project 878662 PASTE-DTCO
• TU Wien Core facilities: VSC-4 and VSC-5
• Research areas:
  • Modeling and Simulation (50%), Nanoelectronics (50%)
• Invited: yes + proof via PDF attachment
• Reviewed: Yes (a program committee exists, a date for notification of acceptance exists, see conference homepage, e.g. call for papers)
• File attachments:
  • Paper as PDF: paper_fillipovic.pdf
  • Proof of invitation as PDF: invitation_filipovic.pdf