Reliability of Platinum Microheater Geometries for MEMS-Based Gas Sensors

Talk (with paper)

• Category: Full-paper Contribution
• Title: Reliability of Platinum Microheater Geometries for MEMS-Based Gas Sensors
• Authors:
  • Filipovic, Lado (m, E360)
• Presenters:
  • Filipovic, Lado (m, E360)
• Conference: IEEE International Integrated Reliability Workshop (IIRW)
• Proceedings Title: Proceedings of the IEEE International Workshop Integrated Reliability
• Proceedings Link: https://ieeexplore.ieee.org/xpl/conhome/10032732/proceeding
• Conference City: South Lake Tahoe, CA
• Conference Country: USA
• Conference Dates: 09/10/2022 - 14/10/2022
• Conference Format: On-site
• Conference Website: https://www.iirw.org/
• Start Page: 10032744-1
• End Page: 10032744-6
• Number of pages: 6
• Language: English
• ISBN: 978-1-6654-5369-1
• DOI: 10.1109/IIRW56459.2022.10032744
• Keywords: Thermo-migration, Electromigration, Platinum, Microheater, MEMS membrane, Gas sensor
• Open access: no
• Research projects
  • Austrian Research Promotion Agency (FFG): 878662, Process-Aware Structure Emulation for Device-Technology Co-Optimization
• Research areas:
  • Modeling and Simulation (40%)
  • Computational Material Science (25%)
  • Modeling and Simulation (25%)
  • Nanoelectronics (10%)
• Invited: no
• Reviewed: yes
• File attachments:
  • Paper as PDF: Filipovic_IIRW2022.pdf
  • Proof of review as PDF: Filipovic_IIRW2022_acceptance.pdf