DTCO Flow for Air Spacer Generation and Its Impact on Power and Performance at N7

Journal article

• Category: Original research article
• Title: DTCO Flow for Air Spacer Generation and Its Impact on Power and Performance at N7
• Authors:
  • Filipovic, Lado (m, E360)
  • Baumgartner, Oskar (m, external)
  • Klemenschits, Xaver (m, E360)
  • Piso, Julius (m, E360)
  • Bobinac, Josip (m, E360)
  • Reiter, Tobias (m, E360)
  • Strof, Georg (m, external)
  • Rzepa, Gerhard (m, external)
  • Stanojevic, Zlatan (m, external)
  • Karner, Markus (m, external)
• Journal: Solid-State Electronics
• Vol: 199
• Article Number: 108527
• Start Page: 1
• End Page: 5
• Number of pages: 5
• DOI: 10.1016/j.sse.2022.108527
• Date of Issue: January 2023
• Language: English
• Keywords: Design-technology co-optimization, Air spacer, Ring oscillator, Process variability, Technology computer aided design,
• Open access: yes CC BY 4.0
• Research projects:
  • Austrian Research Promotion Agency (FFG): 878662, Process-Aware Structure Emulation for Device-Technology Co-Optimization
• TU Wien Core facilities: None
• Research areas:
  • Modeling and Simulation (70 %)
  • Nanoelectronics (30 %)
• Invited: no
• File attachments:
  • Paper as PDF: PAPER.pdf