SOS pseudo-FeFETs after furnace or rapid annealings and thining by thermal oxidation
Journal article
- Category (PICK ONE FROM LIST; DO NOT CHANGE OR ADD NEW CATEGORY!): < Original research article >
- Title: SOS Pseudo-FeFETs after Furnace or Rapid Annealings and Thinning by Thermal Oxidation
- Authors:
- Antonov, V.A. (m, external)
- Tikhonenko, F.V. (m, external)
- Popov, V.P. (m, external)
- Miakonkikh, A.V (m, external)
- Rudenko, K.V. (m, external)
- Sverdlov, Viktor A. (m, E360)
- Journal: Solid-state Electronics
- Vol: 215
- Issue/Number (optional):
- Article Number(optional): 108821
- Start Page: 1
- End Page: 6
- Number of pages: 6
- DOI: 10.1016/j.sse.2023.108821
- Date of Issue: 01/05/2024
- Language: English
- Keywords: Sapphire, Ferroelectric, HfO2 interlayer, Phases, Pseudo-MOSFETs
- Open access: no
- Research projects (TISS-Project-Acronyms ONLY: TISS->Research->My projects: pick from "Acronym" column (only project leaders can access this information)):
- NovoMemLog
- TU Wien Core facilities: None
- Research areas -- Focal Areas and Fields: (pick from TU Wien Research Matrix's subcategories and assign a percentage share; in total it should add up to 100%.):
- Materials Characterization (50%), Nanoelectronics (50%)
- Invited: no
- File attachments:
Edited by Etl, Clemens