Fast 3D Flux Calculation using Monte Carlo Ray Tracing on GPUs

Talk or Poster (with paper)

• Category Full-paper Contribution
• Title: Fast 3D Flux Calculation using Monte Carlo Ray Tracing on GPUs
• Authors:
  • Reiter, Tobias (m, E360)
  • Filipovic, Lado (m, E360)
• Presenters:
  • Reiter, Tobias (m, E360)
• Conference: International Conference on Microelectronic Devices and Technologies (MicDAT)
• Proceedings Title: Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT)
• Proceedings Link: https://www.researchgate.net/profile/Sergey-Yurish/publication/375423899_Microelectronic_Devices_and_Technologies_Proceedings_of_the_5th_International_Conference_on_Microelectronic_Devices_and_Technologies_MicDAT_'2023/links/654a1d69ce88b87031d2cbb0/Microelectronic-Devices-and-Technologies-Proceedings-of-the-5th-International-Conference-on-Microelectronic-Devices-and-Technologies-MicDAT-2023.pdf
• Conference City: Funchal
• Conference Country: Portugal
• Conference Dates: 20/09/2023 - 22/09/2023
• Conference Format: On-site
• Conference Website: https://micdat-conference.com/
• Start Page: 67
• End Page: 72
• Number of pages: 6
• ISBN: 978-84-09-53748-8
• DOI: 10.13140/RG.2.2.13265.71524
• Language: English
• Keywords: Process simulation, Plasma etching, High-aspect-ratio, Ray tracing
• Open access: no
• Research projects:
  • ProMod
• TU Wien Core facilities: None
• Research areas -- Focal Areas and Fields::
  • < e.g.: Modeling and Simulation (50%), Nanoelectronics (50%) >
• Invited: no
• Reviewed: yes
• File attachments:
  • Paper as PDF:MicDAT2023_Reiter.pdf
  • Proof of review as PDF:MicDAT2023_Reiter_Acceptance.pdf